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4 results found in all.

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1	Characterization of DC magnetron sputtering deposited thin films of TiN for SBN/MgO/TiN/Si structural waveguide Author(s):Xu Xuan-qian, Ye Hui, Zou Tong Clicked:6374 Download:4654 Cited:0 <Full Text> Journal of Zhejiang University Science A 2006 Vol.7 No.3 P.472-476 DOI:10.1631/jzus.2006.A0472
2	Preparation of AlN thin films for film bulk acoustic resonator application by radio frequency sputtering Author(s):Kan LI, Hao JIN, De-miao WANG, Yi-fei TANG Clicked:6921 Download:3589 Cited:3 <Full Text> Journal of Zhejiang University Science A 2009 Vol.10 No.3 P.464-470 DOI:10.1631/jzus.A0820572
3	High Q, high frequency, high overtone bulk acoustic resonator with ZnO films Author(s):Meng-wei Liu, Ming-bo Zhu, Jun-hong Li, Cheng-hao Wang Clicked:6927 Download:3030 Cited:1 <Full Text> Journal of Zhejiang University Science C 2013 Vol.14 No.4 P.279-282 DOI:10.1631/jzus.C12MNT07
4	Band-gap tunable (Ga_xIn₁₋_x)₂O₃ layer grown by magnetron sputtering Author(s):Fabi Zhang, Jinyu Sun, Haiou Li, Juan Zhou, Rong Wang, Tangyou Sun, Tao Fu, Gongli Xiao, Qi Li, Xingpeng Liu, Xiuyun Zhang, Daoyou Guo, Xianghu Wang, Zujun Qin Clicked:5418 Download:5219 Cited:0 <Full Text> <PPT> 1323 Frontiers of Information Technology & Electronic Engineering 2021 Vol.22 No.10 P.1370-1378 DOI:10.1631/FITEE.2000330

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